- High-NA EUVL: The next major step in lithography https://www.imec-int.com/en/articles/high-na-euvl-next-major-step-lithography 5 comments hardware
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- ASML explores Hyper-NA chipmaking tools as the next step in shrinking transistors — tools would debut in 2030, but significant technology and cost hurdles remain | Tom's Hardware https://www.tomshardware.com/tech-industry/manufacturing/asml-explores-hyper-na-chipmaking-tools-as-the-next-step-in-shrinking-transistors-tools-would-debut-in-2030-but-significant-technology-and-cost-hurdles-remain 25 comments
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