EUV Defects Cited in 5-nm Node - EE Times - discu.eu

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Extreme UV chip defects may force a new approach to processor design | Ars Technica https://arstechnica.com/gadgets/2018/02/random-errors-throw-up-more-hurdles-in-the-move-to-extreme-uv-chip-fabricating/ 7 comments

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